| 摘要 |
PURPOSE:To obtain a clean room capable of being built on the condition of a small area by arranging auxiliary equipments below a working room. CONSTITUTION:The building 31 of a clean room is provided with a working room 33, flowing rooms 35, 35 and an air discharging room 39, partitioned by a floor member 37. The auxiliary equipments of a processing unit 41 or a security device 59 or the like are arranged in the air discharging room 39 immediately below the working room 33. Air, flowing through a processing space 43, is sent into the air discharging room 39 through an exhaust port 49, further, is returned from a suction port 51 to air purifying machines 65a, 65b or the same machine 65c through the flowing room 35 again. The returning flow of air is circulated through the filters of the air purifying machines 65a-65c repeatedly in such manner whereby a cleanness, corresponding to a class 10, is realized in the processing space 43. The side of the working room 33 may be utilized as the flowing room 35 of the returning flows 69b, 69c and a space-saving type clean room, capable of returning flows 69b, 69c and a space- saving type clean room, capable of being built on a small floor space, may be obtained. |
