| 发明名称 |
Apparatus for handling semiconductor wafers during fabrication of integrated circuits |
| 摘要 |
A semi-conductor wafer handling apparatus for use during fabrication of semi-conductor wafers, made of alumina and having a relieved flat face connected to a source of air pressure differential.
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| 申请公布号 |
US4687242(A) |
申请公布日期 |
1987.08.18 |
| 申请号 |
US19850735182 |
申请日期 |
1985.05.17 |
| 申请人 |
VAN ROOY, DICK |
发明人 |
VAN ROOY, DICK |
| 分类号 |
B25B11/00;H01L21/683;(IPC1-7):B25B11/00;B25J15/06 |
主分类号 |
B25B11/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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