| 摘要 |
PURPOSE:To facilitate fine adjustment for the flow rate by clamping a valve element comprising a piezoelectric element between a valve body and a housing, and providing a control circuit having a mechanism for short-circuiting both terminals of the piezoelectric element. CONSTITUTION:A valve seat 7 having a valve hole 3 is projected toward the interior of a valve chest 11 between a valve body 1 and a housing 9. A valve element 8 has a piezoelectric ceramic body 13 fixed to one surface of a diaphragm plate 12 to form a piezoelectric element. There is provided a control circuit having a function for short-circuiting both terminals of the piezoelectric element. Therefore, the valve element 8 is seated on the valve seat 7 or separated therefrom by curvature movement of the valve element 8 to perform fine adjustment for the flow rate of a fluid.
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