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发明名称
Semiconductor devices having modifier-containing surface oxide layer
摘要
申请公布号
US3340445(A)
申请公布日期
1967.09.05
申请号
US19640420523
申请日期
1964.12.23
申请人
RADIO CORPORATION OF AMERICA
发明人
JR. JOSEPH H. SCOTT,;OLMSTEAD JOHN A.
分类号
C23C16/40;H01L21/00;H01L21/225;H01L21/316;H01L29/00
主分类号
C23C16/40
代理机构
代理人
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地址
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