| 摘要 |
PURPOSE:To produce the titled high-purity beta-type silicon carbide powder in a short time by electrical heating a mixture of metallic silicon powder and carbon powder to excite a chemical chain reaction. CONSTITUTION:Metallic silicon powder and carbon powder are mixed in 0.5/1.5 ratio of C/Si, and the mixed powder is electrically heated or induction-heated in a vacuum or an inert gas atmosphere (Ar, He, etc., are used at ordinary pressure - 200atm). The power at this time is preferably controlled to about 100-2,000W, and beta-type SiC powder of high purity (<=about 0.08% oxygen content) is obtained in a short time (about several sec - several tens sec). Since the particle diameter of SiC to be synthesized corresponds almost to the particle diameter of the raw Si powder, the particle diameter of the beta-type SiC powder can be easily controlled. |
