SHIELD CASE AND MEMS MICROPHONE HAVING THE SAME

摘要

A shield case in which a minimum distance for adhering to a gasket can be ensured on a top plate such a from the view point of airtightness, and an MEMS microphone having shield case. The shield case for shielding an MEMS chip mounted on a substrate from the outside comprises a top plate and a plurality of side plates, and the thickness of the plurality of side plates is thicker than that of the top plate. With such an arrangement, the area of the top plate can be widened as compared with a conventional shield case of a uniform thickness. Consequently, a region for making the gasket adhere to the top plate can be ensured without altering the position, size, range and the like, of a chucking area from those of conventional shield cases.