发明名称 |
PHOTORESIST COMPOSITION |
摘要 |
A photoresist composition is disclosed which is a mixture of a photoactive compound and an alkali soluble resin binder comprises of an unsaturated dicarboxylic acid esterified polymeric material, such as a phenolic resin containing a plurality of acid esterifiable groups esterified with an unsaturated dicarboxylic acid anhydride having the formula <IMAGE> wherein R1 and R2 are independently selected from hydrogen and alkyl groups containing 1 to 3 carbon atoms, R3 and R4 are alkylene groups containing 1 to 3 carbon atoms and x and y are either 0 or 1. |
申请公布号 |
JPS62147452(A) |
申请公布日期 |
1987.07.01 |
申请号 |
JP19860257149 |
申请日期 |
1986.10.30 |
申请人 |
INTERNATL BUSINESS MACH CORP <IBM> |
发明人 |
KAORIN ENU CHION;BII JIEIN RIN YAN;JIYAA MIN YAN |
分类号 |
G03C1/72;G03F7/008;G03F7/012;G03F7/022;G03F7/023;G03F7/038;G03F7/039;H01L21/027 |
主分类号 |
G03C1/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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