发明名称 PHOTORESIST COMPOSITION
摘要 A photoresist composition is disclosed which is a mixture of a photoactive compound and an alkali soluble resin binder comprises of an unsaturated dicarboxylic acid esterified polymeric material, such as a phenolic resin containing a plurality of acid esterifiable groups esterified with an unsaturated dicarboxylic acid anhydride having the formula <IMAGE> wherein R1 and R2 are independently selected from hydrogen and alkyl groups containing 1 to 3 carbon atoms, R3 and R4 are alkylene groups containing 1 to 3 carbon atoms and x and y are either 0 or 1.
申请公布号 JPS62147452(A) 申请公布日期 1987.07.01
申请号 JP19860257149 申请日期 1986.10.30
申请人 INTERNATL BUSINESS MACH CORP <IBM> 发明人 KAORIN ENU CHION;BII JIEIN RIN YAN;JIYAA MIN YAN
分类号 G03C1/72;G03F7/008;G03F7/012;G03F7/022;G03F7/023;G03F7/038;G03F7/039;H01L21/027 主分类号 G03C1/72
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