APPARATUS FOR PRODUCING ELECTROPHOTOGRAPHIC SENSITIVE BODY

摘要

PURPOSE:To form films to a uniform film thickness and quality in the stage of forming photosensitive layers on cylindrical substrates by a plasma CVD method by discharging a gaseous raw material from a discharge pipe opened into the spacing between electrodes which consist of metallic materials each having an arc-shaped section and face the substrates. CONSTITUTION:Conductive bar-shaped bases 13 are disposed in parallel on the same circumference in a vacuum vessel 11. The cylindrical conductive substrates 12 are mounted on the plural bases 13 in such a manner that the substrates can be driven to revolve. The counter electrodes 14 are formed of the plural metallic members each having the arc-shaped section and are disposed around the bases 13 apart at a spacing therefrom. A voltage is impressed between the electrodes 14 and the substrates 12 to generate glow discharge, by which the gaseous raw material introduced into the vacuum vessel 11 is decomposed and the photosensitive layers are formed on the surfaces of the substrates 12. The gas is discharged from the discharge pipe 17 opened 25 into the spacing between the electrodes 14.