发明名称 |
Piezoelectric transducer and process for its production |
摘要 |
A piezoelectric transducer made from a piezoelectric thin film based on lead titanate (PbTiO3): comprising a substrate having sawtooth profile gratings formed on the surface by anisotropic etching; a platinum layer formed by graphoepitaxy method on the substance; a piezoelectric thin film formed on the platinum layer; and an upper electrode layer. Although platinum shows (111) orientation, a (100)-oriented platinum film can be obtained by depositing platinum on said substrate having the gratings by graphoepitaxy. A c-axis-oriented piezoelectric film of excellent piezoelectricity can be formed on this platinum film.
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申请公布号 |
US4677336(A) |
申请公布日期 |
1987.06.30 |
申请号 |
US19860824728 |
申请日期 |
1986.01.31 |
申请人 |
HITACHI, LTD. |
发明人 |
KUSHIDA, KEIKO;TAKEUCHI, HIROSHI |
分类号 |
H01L41/08;H01L41/22;H03H9/00;H03H9/15;H04R17/00;H04R31/00;(IPC1-7):H01L41/08 |
主分类号 |
H01L41/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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