| 摘要 |
PURPOSE:To enable easy and efficient drying of a material to be treated in a drying chamber, by continuously arranging an evacuation chamber, a main drying chamber furnished with an evacuation apparatus, a heating apparatus and a transfer apparatus and a delivery chamber furnished with an evacuation apparatus in the order. CONSTITUTION:An evacuation treatment chamber 4 connected with a vacuum pump 46 directly or interposing a reservoir tank 36 therebetween, a drying chamber 6 furnished with an evacuation apparatus 108, heating apparatuses 94, 96 (e.g. electromagnetic radiator) and a transfer apparatus 90 and a delivery chamber 8 furnished with an evacuation apparatus 136 are arranged continuously in the order. The evacuation treatment chamber 4 and the drying chamber 6, and the drying chamber 6 and the delivery 8 are connected together through gate valves 140. The drying of the material to be treated in the drying chamber can be easily and efficiently carried out by this process. |
