| 摘要 |
PURPOSE:To attain an observation for the state or the irregularity, etc., of the surface at the plane of a body while eliminating a dead angle by using a combination of four light projection devices and two image pickup devices. CONSTITUTION:Four light projection devices 11E, 11W, 11S, and 11N are arranged at the periphery of a body 1 with almost equal intervals centering the body 1, and slit light is irradiated to the body 1 with the devices. Also, image pickup devices 21 and 22 are arranged respectively between the two light projection devices 11E and 11N, and between the two light projection devices 11S and 11W. By driving selectively the four light projection devices 11E, 11W, 11S, and 11N, the upper plane and an optional surface on all of the side planes of the body 1 are irradiated with the slit light, and reflected light is received at either of the image pickup devices 21 or 22. |
