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发明名称
摘要
申请公布号
JPS6293245(U)
申请公布日期
1987.06.15
申请号
JP19850182427U
申请日期
1985.11.27
申请人
发明人
分类号
G06F11/22;G01R31/28;G05B23/00;G06F1/00;G06F1/18;H01L23/32;(IPC1-7):G06F11/22
主分类号
G06F11/22
代理机构
代理人
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