发明名称 |
COPPER FINE WIRE FOR BONDING |
摘要 |
PURPOSE:To make bonding in manufacture of high integrated circuit semiconductor, etc., highly efficient by incorporating trace amounts of Mg to a pure-copper fine wire. CONSTITUTION:The copper fine wire for bonding is constituted of a composition in which 0.0001-0.028wt% Mg is incorporated to pure Cu of >=99.99wt% purity. Owing to the above composition, bonding can be performed under low bonding load without breaking an insulating layer. On application of this copper fine wire, a highly efficient bonding similar to that by the use of Au fine wires can be performed by use of inexpensive copper wires in manufacture of high integrated circuit semiconductor. |
申请公布号 |
JPS62130248(A) |
申请公布日期 |
1987.06.12 |
申请号 |
JP19850268754 |
申请日期 |
1985.11.29 |
申请人 |
FURUKAWA ELECTRIC CO LTD:THE;FURUKAWA TOKUSHU KINZOKU KOGYO KK |
发明人 |
TANIGAWA TORU;SHIGA SHOJI;KAGA ICHIRO;OKUDA KOZO |
分类号 |
C22C9/00;H01L21/60;H01L23/48 |
主分类号 |
C22C9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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