发明名称 COPPER FINE WIRE FOR BONDING
摘要 PURPOSE:To make bonding in manufacture of high integrated circuit semiconductor, etc., highly efficient by incorporating trace amounts of Mg to a pure-copper fine wire. CONSTITUTION:The copper fine wire for bonding is constituted of a composition in which 0.0001-0.028wt% Mg is incorporated to pure Cu of >=99.99wt% purity. Owing to the above composition, bonding can be performed under low bonding load without breaking an insulating layer. On application of this copper fine wire, a highly efficient bonding similar to that by the use of Au fine wires can be performed by use of inexpensive copper wires in manufacture of high integrated circuit semiconductor.
申请公布号 JPS62130248(A) 申请公布日期 1987.06.12
申请号 JP19850268754 申请日期 1985.11.29
申请人 FURUKAWA ELECTRIC CO LTD:THE;FURUKAWA TOKUSHU KINZOKU KOGYO KK 发明人 TANIGAWA TORU;SHIGA SHOJI;KAGA ICHIRO;OKUDA KOZO
分类号 C22C9/00;H01L21/60;H01L23/48 主分类号 C22C9/00
代理机构 代理人
主权项
地址