| 摘要 |
PURPOSE:To increase throughput by a method wherein a first conveyer device is divided into a mount-side first portion and a positioner-side second portion, a third conveyer device with an arm for delivering flat bodies to the mount-side first portion is provided, and flat bodies in standby are conveyed to a positioning by the positioner-side second portion while delivery is being accomplished by the third conveyer device. CONSTITUTION:Cassette mounts 1A-1C are capable of a vertical movement. Conveyer belts 4, 7, 6 are arranged to face cassettes 1-3, respectively. A belt 4 is succeeded by a belt 5, the belts 4 and 7 are linked, and a belt 8 is provided capable of a vertical, rotary movement. A wafer positioning unit 17 is provided near the end of the belt 5. A wafer processing unit 20 includes an X-Y stage, motor unit, etc., and a cylinder 20A is provided with a rotating mechanism. Between the wafer positioning unit 17 and cylinder 20A, a wafer-delivering arm 18 is provided. Between the belts 5 and 6, there is an auxiliary delivery unit 19 delivering wafers from the wafer positioning unit 17 to the belts 4, 6. In this way, before a wafer for which processing has been completed is carried into a cassette, the next wafer may be taken out, and this results in an improved throughput.
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