发明名称 |
Method for developing negative photoresists. |
摘要 |
<p>A process is provided for developing images in exposed negative photoresists which comprises treating a substrate coated with the photoresist with a mixture of trichloroethane and an aliphatic alcohol, preferably isopropanol or tert-butanol, which may optionally be heated to an elevated temperature. The alcohol is present in an amount up to that forming a constant boiling composition (azeotropic composition).</p> |
申请公布号 |
EP0224843(A2) |
申请公布日期 |
1987.06.10 |
申请号 |
EP19860116317 |
申请日期 |
1986.11.25 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ANSCHEL, MORRIS;GOODRICH, LAWRENCE DUANE;HETRICK, BARTON MAITLAND |
分类号 |
H01L21/30;G03F7/30;G03F7/32;H01L21/027 |
主分类号 |
H01L21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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