| 摘要 |
PURPOSE:To drive at a high speed an accumulation type one-dimensional sensor by illuminating a sample in a shape of a slit and with a high illuminance by a laser light. CONSTITUTION:A light emission beam which has been emitted from a laser light source 1 is curved as to its optical path by total reflection plane mirrors 2, 2', made incident on a concave surface cylindrical lens 3, and this incident beam becomes a sheet-shaped parallel beam which has beam magnified to f<4>/f<3> times in only one direction, by both cylindrical lenses 3, 4. The whole of the parallel beam is made incident on the inside of an exit pupil of an objective lens 8, and the objective lens 8 reduces a section of a sheet-shaped parallel beam which is formed by a field lens 6 in a field diaphragm position and projects it onto a sample 11, therefore, the surface of the sample 11 can be illuminated in a shape of a slit.
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