| 摘要 |
PURPOSE:To obtain a substrate precisely equipped with an information groove at a desired position by forming a jig inserted into a reference plate or a master plate in a sectional projecting shape and giving a sectional recessed part to the jig inserted into the other plate. CONSTITUTION:With the chromium pattern on the reference plate 5 pointed the right, the reference jig 23 is inserted into a through hole 51, and the jig 23 and the plate 5 are vacuum sucked on a reference plate holder 10. An O-ring groove is formed on the reference plate side surface of the diskoid part 232 of the master plate jig 19. Accordingly, the O-ring 24 of a holder 10 and the O-ring 25 of the jig hermetically seal the 1st vacuum chamber 11, and the jig 23 is vacuum-sucked. Then the ring 193 of the jig is inserted into the through hole 61 of the master plate 6 to abut on the master plate holder 15, and the original plate 6 is vacuum-sucked. Next the reference plate 5 and the master plate 6 are abutted to form the 3rd vacuum chamber 21, which is made vacuum by discharging air. The 1st and 2nd vacuum chambers 11 and 16 are returned to air pressure. In that state, an ultraviolet ray 28 is irradiated to transfer the chromium pattern of a reference film 5 on the resist film of the master plate 6.
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