| 摘要 |
PURPOSE:To improve the reliability and the productivity, by constructing a terminal section to have a four-layer structure consisting of a chromium film, a conductive film, a reinforcing film and a protecting film. CONSTITUTION:In a terminal section 2a, a thin chromium (Cr) film 3 having a thickness of 400-500Angstrom is formed on an insulating substrate 1. A thin film 2 is formed on the thin Cr film 3. Further, an about 2,000Angstrom thick reinforcing film 4 of permalloy and an about 500-1,000Angstrom thick protecting film 5 of gold (Au) are superposed thereon. A passivation film 5 with a thickness of about 2mum is also formed over the whole surface except this terminal section 2a. Such construction ensures a sufficient bonding strength between a soldering material 8 and the terminal section 2a and the protecting film prevents the terminal section 2a from being oxidized.
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