| 摘要 |
PURPOSE:To efficiently convey a work and to efficiently form a thin film on a work by rotating the work for forming with the thin film or the work formed with the thin film at 180 deg. while forming the thin film by conveying the work into a thin film forming device. CONSTITUTION:The second step of rotating the phase of a work 15 at 180 deg. to a work conveying direction D at phase rotating position B and the fourth step of rotating the work 15 at a predetermined angle to the position for conveying the work 15 to a thin film forming device 5 at a conveying position C, conveying the work 15 to the device 5 to form the thin film on the work 15 are simultaneously executed. Further, the third step of conveying the work 15 from the phase rotating position B to a conveying position C or from the position C to the position B, the first step of conveying the work 15 from a work containing box one by one to a position B or C, or the sixth step of conveying the work 15 formed with the thin film from the position C or B and rotated at 180 deg. to the work conveying direction D to the work containing box to contain the work therein are simultaneously executed.
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