| 摘要 |
PURPOSE:To detect and correct an error in parallelism whenever there is any error by providing a sensor for detecting the inclination of a grinding wheel surface to a reference surface, and a sensor for detecting the inclination of a workpiece mounting surface to said reference surface. CONSTITUTION:Four non-contact type distance sensors 21 are provided opposite to the periphery of the top surface of an air spindle 3, i.e., the mounting surface of a workpiece 1. Sensors 21 are also provided opposite to the surface of a grinding wheel 14. And, by calculating the inclination of a workpiece mounting surface to a reference surface and the inclination of a wheel surface to the reference surface, the parallelism between the workpiece mounting surface and the wheel surface can be calculated based on the calculated values of the inclinations. Then, voltage is applied to a piezo-electric element 7 to control the posture of a table unit in the direction of making the parallelism between the workpiece mounting surface and the wheel surface zero. |
