| 摘要 |
PURPOSE:To prevent spread of beam after deflection control by providing an electron beam supply means for combining a deflected metal ion beam with an electron beam having such charge density as approximately the same as that of the metal ion beam. CONSTITUTION:A copper ion beam 10 is deflected by a deflection electrode 5 while controlled to be focused onto a point, e.g., point P, on the surface of a printed board 9 by means of a focus control electrode 6. Deflection control of the deflection electrode 5 is performed in two-dimensional side in accordance with a wiring pattern to be formed on the surface of the printed board 9, while focus control by means of the focus control electrode 6 is performed simultaneously. The copper ion beam 10 subjected to deflection control and focus control is led to an electron beam supply section 7 and combined with an electron beam emitted from an electron gun 8 with approximately the same charge density as that of the copper ion beam, then radiated onto the surface of the printed board 9 under electrically cancelled condition. Since repelling force will never function between the copper particles, spread of the beam can be prevented.
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