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发明名称
SEMI-CONDUCTOR FABRICATION
摘要
申请公布号
GB8707249(D0)
申请公布日期
1987.04.29
申请号
GB19870007249
申请日期
1987.03.26
申请人
AHMED, H;HOPPER, A
发明人
分类号
H01L21/98;H01L23/14;H01L23/538;H01L25/065
主分类号
H01L21/98
代理机构
代理人
主权项
地址
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