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发明名称
MANUFACTURE OF EPITAXIAL WAFER
摘要
申请公布号
JPS6288319(A)
申请公布日期
1987.04.22
申请号
JP19850230214
申请日期
1985.10.15
申请人
NEC CORP
发明人
KANAMORI KATSU
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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