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发明名称
摘要
申请公布号
JPS6249237(U)
申请公布日期
1987.03.26
申请号
JP19850140800U
申请日期
1985.09.17
申请人
发明人
分类号
H01L21/52;H01L21/58;H01L29/74;(IPC1-7):H01L21/58;H01L25/02
主分类号
H01L21/52
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