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发明名称
MANUFACTURE OF INSULATED-GATE TYPE SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6265465(A)
申请公布日期
1987.03.24
申请号
JP19850204227
申请日期
1985.09.18
申请人
HITACHI LTD
发明人
MURAMATSU AKIRA
分类号
H01L21/8234;H01L21/265;H01L27/08;H01L27/088;H01L29/78
主分类号
H01L21/8234
代理机构
代理人
主权项
地址
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