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经营范围
发明名称
FOCUSED SUBSTRATE ALTERATION.
摘要
申请公布号
EP0198908(A4)
申请公布日期
1987.03.02
申请号
EP19850905575
申请日期
1985.10.25
申请人
ION BEAM SYSTEMS, INC.;MASSACHUSETTS INSTITUTE OF TECHNOLOGY
发明人
KELLOGG, EDWIN, M.;MELNGAILIS, JOHN
分类号
G03F1/00;H01J37/317
主分类号
G03F1/00
代理机构
代理人
主权项
地址
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