| 摘要 |
PURPOSE:To contrive to enhance sensitivity and accuracy, by providing a shaping means for shaping the intensity distribution of luminous flux so that the max. intensity part of probe light passes through a refractivity varying region largest in light deflection quantity. CONSTITUTION:A photo-physical property measuring apparatus is constituted of an exciting light source for emitting exciting light 2 to the measuring area of a specimen 1, a light intensity modulator 4 for modulating said exciting light 2, an optical element 7 for guiding probe light 5 to the vicinity of the measuring area, an optical position detector 8 for receiving probe light 5 and an intensity distribution shaping means 9 for forming the intensity distribution of luminous flux of probe light 5 so that the max. intensity part of the probe light 5 is almost contacted with the specimen 1 when said probe light 5 reaches the vicinity of the area to be measured. The exciting light 2 is converted by an optical element 7' to be allowed to irradiate the area to be measured while probe light 5 passes through the optical element 7 to pass in parallel to the surface of the area to be measured of the specimen 1 irradiated with the exciting light 2 and reaches the optical position detector 8 and light deflection quantity (x) when probe light 5 is deflected so as to be shown by a dotted line 5' is measured. By this method, measurement can be performed with high sensitivity and high accuracy. |
