METHOD FOR MEASURING FILM THICKNESS,申请号JP19850158654-传众专利搜索

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发明名称	METHOD FOR MEASURING FILM THICKNESS
摘要
申请公布号	JPS6219707(A)	申请公布日期	1987.01.28
申请号	JP19850158654	申请日期	1985.07.17
申请人	FUJITSU LTD	发明人	KOBAYASHI KOICHI;SAKAMOTO JUICHI
分类号	G01B15/00;G01B15/02;H01L21/66	主分类号	G01B15/00
代理机构		代理人
主权项
地址

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