| 摘要 |
1. Method for optical distance measurement, wherein an entry beam (4 ; 4a ; 7 ; 55 ; 405) is diffracted at a displaceable optical measuring grating (3 ; 43) for generating a measuring beam (9 ; 4b ; 58) whose phase is determined by superimposition with a reference beam (4a ; 8 ; 57), characterized in that the reference beam (4a ; 8 ; 57) is collinear with and polarized perpendicularly to the measuring beam (9 ; 4b ; 58), and that the phase difference between the measuring and the phase difference between the measuring and the reference beam occuring during the displacement of the measuring grating (3 ; 43) is determined by electrooptical phase compensation. |
