| 摘要 |
PURPOSE:To generate plasma spirally hence uniformly by forming magnets connected with a rotational driving device to the double spiral shape so that the respective poles are alternately disposed at prescribed intervals. CONSTITUTION:A plane target 1 is provided as a cathode material. The magnets 2 constituted in such a manner that the N poles and S poles are spirally formed double and that the respective poles are radially and alternately disposed at the prescribed intervals are disposed on the bottom surface side of the target in proximity thereto. The magnets 2 are rotated along the target 1 by the rotational driving device 3 connected to the magnets 3 to move the spirally generated plasma 4 toward the outside or inside of the radial direction. The plasma 4 is generated and moved over the entire part above the target 1 and the target 1 material is uniformly splashed by such constitution. A material to be treated is thereby uniformly etched.
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