| 摘要 |
PURPOSE:To facilitate variation of the position, the shape and the transmittance of a light detecting part only by changing a filter by providing a space filter, composed of a light shielding film which transmits only the light of a required shape and at a required position with a required transmittance, on the upper surface of a main body of a semiconductor light detection element. CONSTITUTION:A space filter 5, composed of a light shielding film which is so formed as to cover the circumference of the upper part of a P-type diffused layer 3, is formed at the same time as metal electrodes 4 are formed by evaporation of aluminum. At that time, mask pattern for forming the metal electrodes 4 and mask pattern for forming the space filter 5 are provided in a same mask so that the metal electrodes 4 and the space filter 5 can be formed simultaneously only by using this mask and the process can be simplified. Therefore, as the space filter 5 is composed of an aluminum film, light can be accepted only by the parts W1 and W2 which are not covered with the space filter 5. With this constitution, a light detection apparatus with a light detecting part of a required position and a required shape can be obtained only by changing the mask for forming the space filter 5. |
