CASSETTE FOR SEMICONDUCTOR WAFER

摘要

PURPOSE:To realize a non-contact identification of a cassette for a semiconductor wafer by a method wherein a ceramic resonator is built into a cassette and reads stored data. CONSTITUTION:A cassette 1 is made of Teflon. Boards 2 are located to face each other and linked together by a bridge 3. The boards 2 are so provided with a plurality of grooves 4 arranged at prescribed intervals as to stop a semiconductor wafer. A ceramic resonator 5 and a loop 6 linked thereto are built into the bridge 3. The ceramic resonator 5 and loop 6 constitute a memory mechanism capable of recognizing and reading a decimal six-digit group. The memory mechanism is capable of storing very large quantities of data and does not relay on any power source for its functioning. Response to a data transfer device is accomplished by means of an electromagnetic communication method. The data transfer device provides each cassette 1 with an identification number before the cassette 1 is carried to an automated production line for the pre-treatment of its semiconductor element.