发明名称 |
Method of making thin film device |
摘要 |
A thin film device such as an amorphous thin film solar battery is easily made with high integration by use of metal-diffused regions in the thin film as an electrical connection region across the thickness of the thin film. By use of such metal-diffused regions 24, 24 . . . for connection between transparent stripe shaped electrodes 21', 21'. . . disposed between glass substrate 20 and amorphous silicon thin film 23 and stripe shaped metal electrodes 25, 25 . . . on the top surface of the thin film 23, series connected solar battery cells can be made with a small number of process steps.
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申请公布号 |
US4624045(A) |
申请公布日期 |
1986.11.25 |
申请号 |
US19850716604 |
申请日期 |
1985.03.27 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
ISHIHARA, SHINICHIRO;HIRAO, TAKASHI;MORI, KOSHIRO;ONO, MASAHARU;KITAGAWA, MASATOSHI |
分类号 |
H01L31/042;H01L23/535;H01L27/142;H01L31/0224;H01L31/04;H01L31/20;(IPC1-7):H01L31/18;H01L27/14 |
主分类号 |
H01L31/042 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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