| 摘要 |
PURPOSE:To extend a durable period in a dielectric film, by providing a coating member of ceramic system, with which the dielectric film is coated, in a part except a processed material fixed position on a stage, in the case of an electrostatic chuck electrostatically fixing a processed material. CONSTITUTION:A chuck, forming an annular groove 5 in a corresponding position in the peripheral edge part of a processed material A on a stage 1, glues a dielectric film 3 to be attached inside the groove 5 while extends a part of the film to the peripheral part of the stage 1, and a power supply unit, not shown in the drawing, is connected with an electrode 2. And a part except a fixed position of the processed material A mounts plate-shaped and annular coating members 6 consisting of material of carbon, quartz and ceramic or the like. Accordingly, even when the processed material A performs etching, the chuck, preventing the dielectric film 3 from being consumed even except in the fixed position of the processed material A by the coating member 6, enables the electrode 2 to be prevented from also being exposed.
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