| 摘要 |
PURPOSE:To enable table recording free of fogging even in the case of an ink having a relatively low resistance and free of dissolution of an electrode through corrosion in an electric field even when an inexpensive electrode formed from Al, Cr or the like is used, by a method wherein a surface except a specified part of each electrode is surface-treated with an amorphous material. CONSTITUTION:Each of individual electrodes 5... formed from Cr or Al is surface-treated with a film 20 of one of amorphous silicon nitride (a-SiN), amorphous silicon carbide (a-SiC), hydrogenated amorphous silicon nitride (a-SiN;H) and hydrogenated amorphous silicon carbide (a-SiC;H) on the surface thereof except a tip part d3 (d3=0.1-5mm) and an electrode take-out part d4. A common electrode 9 is similarly surface-treated with a film 21 of one of a-SiN, a-SiC, a-SiN;H and a-SiC;H on the surface thereof except an electrode take-out part d5. |
