| 摘要 |
PURPOSE:To make possible the depth control with high accuracy without receiv ing the influence of the difference in the accuracy of pattern formation by connecting two conductor patterns with a conductive magnetic layer via through- holes formed thereon. CONSTITUTION:The pattern of conductor layers 16, 17 and insulating layers 2a, 2b are formed on a substrate 1 which acts as a lower magnetic core and thereafter the conductive magnetic layer 20 to short circuit both conductor layers 16, 17 is formed via through-holes 18, 19 formed by removing part of the insulating layer 2, by which a monitor 15 is completed. The arrival of the polishing at the prescribed position can be recognized from the abrupt change in the electric resistance between the conductor layers 16 and 17 when the thin film magnetic head provided with such monitor 15 is polished. The prescribed depth length is thereby obtd. The influence of the pattern shifting of the monitor and the difference in the accuracy of the pattern formation is thus eliminated and the depth control with high accuracy is made possible. |
