| 发明名称 |
X-ray source comprising double-angle conical target |
| 摘要 |
An improved X-ray source for a lithographic system comprises a double-angle conical target. The target is characterized by a small apparent source diameter and an efficient cooling system. Submicron resolution and high-power operation are thereby made feasible.
|
| 申请公布号 |
US4618972(A) |
申请公布日期 |
1986.10.21 |
| 申请号 |
US19840648021 |
申请日期 |
1984.09.07 |
| 申请人 |
AT&T BELL LABORATORIES |
发明人 |
GEORGIOU, GEORGE E.;POULSEN, MARTIN E. |
| 分类号 |
H01J35/08;H01J35/12;(IPC1-7):H01J35/08 |
主分类号 |
H01J35/08 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
