| 摘要 |
PURPOSE:To work only an extremely small working necessary part accurately, by detecting said part by rod lenses to position laser beam machining device, and working the part locally while sealing working liquid. CONSTITUTION:The extremely small working necessary part 12 is detected by the rod lenses 8, 9, to arrange processing apparatus so that irradiation center of a laser beam 10 is positioned to the part 12 of a material 11 to be worked. Next, working liquid is introduced from an introducing pipe 7 to fill space surrounded by an inner tube 3 to bring the part 12 to contact therewith, exhausted from a piping 6 through a space surrounded by an inner tube 2, air is allowed to flow as sealing fluid through a space surrounded by an outer tube 1, to work the part 12 by the light 10. Thereat, denoting pressure of processing liquid in the tube 3 as P3, that between the tubes 3 and 2 as P2, that of sealing fluid between the tubes 1 and 2 as P1, a relation of P1>P3>P2 is maintained. In this way, contamination of the other parts due to working liquid is prevented. |
