| 摘要 |
PURPOSE:To obtain a high-accuracy measuring machine for a long measuring stroke, by composing measuring apparatuses of the No.1 detector for rough detection and the No.2 detector for a small range detection, namely, based on a 2-stage measuring principle. CONSTITUTION:A number of pulses generated in a pulse generator 18 by a driven motor 16 is detected by the No.1 detector 19 and consequently, a stroke length of a stylus carrier 5 is detected with the smallest unit as one pitch t. This detected amount is expressed as nXt. Further, an indicated value of the No.2 detector 22 prior to the displacement is assumed as M0 and that after the displacement as m1. m1-m0 indicates a fraction less than the pitch t of the carrier 5; i.e. an accurate amount of displacement of a stylus supporting board 5 less than the pitch t. Output signal 1 data from the No.1 detector 19, No.2 detector 22 and storing apparatus 25 are subjected to addition and subtraction in a calculating processing apparatus 23 and the result is displayed in a displaying apparatus 27.
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