| 摘要 |
PURPOSE:To obtain a simple magnetic recording medium which is used suitably to a vertical magnetic recording job with excellent magnetic characteristics and low production cost, by setting a substrate which is under a film formation mode into a floating state. CONSTITUTION:A substrate 20' is shifted to a take-up roll 23 from a supply roll 22 via a cylindrical can 21'. A pair of 1st targets Ta1 and Tb1 made of a soft magnetic material such as an Fe-Ni alloy, etc. which is used as a foundation layer are sputtered in the same way as conventional. Then a soft magnetic thin film is formed on the substrate 20' at a temperature equal to that of the can 21'. This substrate 20' is shifted along the can 21'. Then a pair of 2nd targets Ta2 and Tb2 made of a magnetic material such as a Co-Cr alloy, etc. which is used as a magnetic recording layer are sputtered as conventional. Thus a magnetic recording layer is obtained, when the substrate 20' is separated from the can 21' and set under a floating state. As a result, the sputtering radiant heat is stored on the substrate 20' and therefore the temperature of the substrate 20' rises up. Thus a film can be produced while the substrate 20' is heated.
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