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发明名称
SUBSTRATE-BIAS VOLTAGE GENERATOR
摘要
申请公布号
EP0068611(B1)
申请公布日期
1986.08.20
申请号
EP19820302403
申请日期
1982.05.11
申请人
FUJITSU LIMITED
发明人
TSUGE, NORIHISA;NAKANO, TOMIO;NAKANO, MASAO
分类号
H01L27/04;G05F3/20;G11C11/407;H01L21/66;H01L29/78;H01L21/822;(IPC1-7):G05F3/20
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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