| 摘要 |
PURPOSE:To produce the magnetic disc of a thin film which has a smoothly coated film surface and a faultlessly coated film by providing an air supply port in order to fill the inside of a chamber with a solvent atmosphere. CONSTITUTION:In the vertical coating device of the magnetic disc, an Al substrate 1 for the magnetic disc is fitted to a spindle 2 in a vertical state and clamped by a cap 3. A magnetic paint is ejected through the nozzles 4, 5 to coat the top and under surfaces of the substrate 1. In such a stage, since the rotation of a motor 6 is transferred to the spindle 2 to rotate the substrate 1, the excess magnetic paint on the substrate 1 is flung away by the centrifugal force to form a magnetic film having the same thickness on both surfaces. In such a case, a solvent atmosphere is supplied through the air supply ports 9, 10 provided on the chamber 8 and the degassing is executed through the exhaust ports 11-14. Furthermore the solvent evaporation is performed by the steam bottles 19, 20 to send the vapor atmosphere into the chamber 8. The flying paint is removed from the discharged air and circulated to the air supply ports 9, 10 from the exhaust ports 11-14.
|
