| 摘要 |
PURPOSE:To obtain the titled high-purity fluorosilane in improved reaction efficiency, by subjecting a partially substituted chlorosilane to halogen exchange by the use of ZnF2. CONSTITUTION:A nonpoisonous fluorinating agent consisting of anhydrous ZnF2 which is heat-treated at about 200 deg.C for about 4hr and completely dehydrated is suspended in an organic solvent such as ether, etc. A partially substituted chlorosilane shown by the formula I (n=1-3) in a gaseous phase is passed through the suspension at -30-40 deg.C, subjected to halogen exchange reaction, to give a partially substituted fluorosilane shown by the formula II.
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