| 摘要 |
PURPOSE:To impart antistatic property to the surface of a cellulose nitrate resin thin film using for the dust-proofing in an exposure and baking apparatus for the production of integrated circuit, by irradiating the thin film with an extreme ultraviolet radiation. CONSTITUTION:A cellulose nitrate thin film is irradiated with ultraviolet radia tion having a wavelength of <300nm. The ultraviolet radiation source is prefer ably e.g. the line of low-pressure mercury lamp (254nm).
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