发明名称 |
Force sensors |
摘要 |
A piezoelectric beam structure for a vibrating beam force sensor in which three coplanar beams of piezoelectric material are spaced side by side and supported between respective common mountings at either end. The two outer counterbalancing beams in operation flex in opposite phase to the center main beam, with each beam flexing in a direction normal to the beam plane. A force sensor which includes this piezoelectric beam structure.
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申请公布号 |
US4594898(A) |
申请公布日期 |
1986.06.17 |
申请号 |
US19840617712 |
申请日期 |
1984.06.06 |
申请人 |
FISHER CONTROLS INTERNATIONAL, INC. |
发明人 |
KIRMAN, RICHARD G.;LANGDON, ROGER M. |
分类号 |
G01L1/10;G01L1/16;G01L9/00;(IPC1-7):G01L1/10 |
主分类号 |
G01L1/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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