| 摘要 |
PURPOSE:To obtain a lightweight and inexpensive substrate for a total reflecting mirror having a high performance evaluating index FM and undergoing no breakage even when laser is damaged by a mistake, by polishing the surface of a plate of a hard metal such as molybdenum or tungsten formed on a silicon substrate. CONSTITUTION:A plate 2 of a hard metal such as molybdenum or tungsten is adhered to a silicon substrate 1, and the surface of the plate 2 is polished to form a substrate 3 for a total reflecting mirror. The substrate 3 is coated with a reflecting film by vapor-depositing gold. The substrate 3 has a high performance evaluating index FM comparable to that of a molybdenum or tungsten substrate. The amount of the expensive material used is small, the substrate is light in weight and inexpensive. Even when the high reflecting film is damaged, the substrate is not broken, so the safety can be increased.
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