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发明名称
摘要
申请公布号
DE3231735(C2)
申请公布日期
1986.05.28
申请号
DE19823231735
申请日期
1982.08.26
申请人
SEMIKRON GESELLSCHAFT FUER GLEICHRICHTERBAU U. ELEKTRONIK MBH, 8500 NUERNBERG, DE
发明人
LOEWER, DIETER, 8540 SCHWABACH, DE;STEINBERGER, OTTO, 8500 NUERNBERG, DE
分类号
C23C14/04;C23C14/50;H05K3/14;(IPC1-7):C23C13/08;H01L21/20
主分类号
C23C14/04
代理机构
代理人
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