| 摘要 |
PURPOSE:To easily make accurate positioning, by scanning such two objects that contain the overlapped sections of their area type marks in their scanning areas by using two scanning lines. CONSTITUTION:Filters 10, condenser lenses 11, and half mirrors 14 are respectively arranged along the optical paths of lights sources 9 and diaphragms 13 and image forming lenses 12 are provided along reflecting optical paths. Luminous fluxes transmitted by the lenses illuminate two similar square marks 1R and 2R and another two similar square marks 2R and 2L on glass bases 1 and 2, respectively. Moreover, by respectively providing half mirrors 14 and image pickup tubes 15 along optical paths reflected by the bases 1 and 2, picked up images are displayed on a monitor TV 17 through camera control units 16. Therefore, picture images of the above-mentioned right and left marks 1R-2L separately taken by the image pickup tubes 15 are combined by means of a center wiper 100 and displayed in one monitor. In this case, video signals are inputted in a CPU18 and positioning is performed by performing relative position detection and driving a motor 19. |
