Vacuum transfer device.

摘要

The vacuum transfer device comprises a central processing chamber (2) and a plurality of additional chambers (11) in vacuum-tight connection therewith. Inside the central chamber (2) is mounted a rotable coulisse arrangement (21) driven by motors (22,33) located outside the chamber (2) and extendable so as to reach into the additional chambers (11) when correctly aligned. The device serves to transfer objects between manufacturing or measuring work stations without intermediate venting and re-evacuation of the system of chambers.