| 摘要 |
PURPOSE:To form diamond on a substrate on an electrode by impressing a DC voltage across one of electrodes facing oppositely to each other and a screen mesh to generate DC glow discharge and to decompose and excite a carbon compd. and impressing also a DC voltage to another independent electrode. CONSTITUTION:In a process for forming diamond on a substrate 5 by decomposing gas or vapor of a carbon compd. 10 in DC glow discharge and exciting the decomposed product, a screen mesh 3 is arranged between two confronting electrodes 2, 6. A DC voltage is impressed across one 2 of the electrodes and the screen mesh 3 to generate a DC glow discharge. By impressing also a DC voltage across another independent electrode 6 and the screen mesh 3, diamond is formed on the substrate 5 provided on the electrode 6. The apparatus is constituted of a vacuum tank 1 connected to a gas feeding part and an evacuating line, a screen mesh 3 movable between the two electrodes 2, 6 confronting in the tank 1, etc. |
